Focused Ion Beam Scanning Electron Microscopes (FIB-SEM)

Focused Ion Beam Scanning Electron Microscopy (FIB-SEM) is an advanced imaging and analysis technique used extensively in materials science and biological research. It combines the capabilities of a FIB and a SEM to provide high-resolution 3D imaging and precise material characterization. The FIB allows for site-specific material removal/deposition for cross sectioning, preparing TEM or atom probe samples, nano-prototyping, and circuit editing. The SEM component offers high-resolution imaging of the sample's surface, creating a powerful tool for analyzing microstructures and nanostructures with exceptional precision. 

Typical Applications

  • Site specific preparation of cross sections for high-resolution SEM and TEM analysis 
  • Deposition of metal contacts to devices 
  • SEM and ion beam imaging of substrates 

Instruments

ThermoFisher Scientific Helios Hydra Multi-Ion Species Plasma FIB-SEM
ThermoFisher Scientific Helios Hydra Multi-Ion Species Plasma FIB-SEM 
  • Multi-ion species (argon, nitrogen, oxygen, and xenon) dual beam FIB/SEM 
  • Higher current capabilities, compared to a gallium tool, allowing for rapid milling through a wide array of materials 
  • Large-area cross-sectioning/bulk material removal 
  • Serial FIB milling with slice and view for 3D reconstructions, ability to collect EDS data with slice and view 
  • Maps software for large area, high-resolution imaging 
  • Oxygen ion milling for artifact-free cuts through biological tissue and other organics 
  • EBSD and EDS detectors 
  • EasyliftTM micromanipulator for in-situ sample manipulation 
  • Electron flood gun charge neutralizer to assist in milling insulation substrates 
  • iFastTM software for writing custom automation scripts 
  • STEM, Thru-lens immersion, Everhart-Thornley, CDEM, and CBS detectors 
  • Drift-corrected frame integration imaging 
FEI Helios 600i FIB-SEM.
FEI Helios 600i FIB-SEM
  • Field emission electron and ion beam sources, allowing high-resolution SEM imaging and excellent ion beam density 
  • EasyliftTM micromanipulator for in-situ sample manipulation 
  • Electron flood gun charge neutralizer to assist in milling insulation substrates 
  • Quorum cryo transfer system for beam sensitive materials such as polymers or biological specimens 
  • Gas injection systems to assist with electron/ion beam metal deposition, and ion milling applications (Pt, insulator enhanced etch (XeF2), selective carbon mill, and carbon) 
  • 5-axes eucentric stage 
  • 16-bit patterning system 
  • STEM, Thru-lens immersion, Everhart-Thornley, CDEM, and CBS detectors 
  • Drift-corrected frame integration imaging
  • Maps software for large area, high-resolution imaging 
  • Slice and View software for 3D reconstructions 
  • iFastTM software for writing custom automation scripts 

 

Instrument Contact: Valerie Brogden