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This facility provides resources for sample preparation and materials analysis by electron probe micro analysis (EPMA), a quantitative elemental analysis technique. This technique delivers: 

• Spatial resolution of 1µm in x-y dimension  
• Composition and thickness of nanometer scale layers for thin films 
• Flexibility and accuracy in analyzing unknown samples of arbitrary composition by physics-based quantitative matrix correction procedures 
• Quantitative composition maps to visualize the spatial distribution of elements 
• Detection limits on the order of 100 ppm (0.01 wt%) with wavelength dispersive spectrometry (WDS) and 1000 ppm (0.1 wt%) with energy dispersive spectrometry (EDS) 

Further information about the Microanalytical Facility.

Instruments

• Electron Microprobe (EPMA)

Facility Contact: Julie Chouinard