The 3D model of PDOT film on patterned ITO substrate as measured by the optical profilometer. Vertial range: ∼180 nm, lateral range: ∼1.5 mm.

Instrument Calendars:

Futures and specifications:

• Non-contact, 3D surface profiling base on white light interferometry.
• Sub Angstrom vertical resolution.
• Sub micron lateral resolution.
• Motorized objective and zoom lens turret.
• Motorized 150 mm sample stage with tip/tilt control.
• Field stitching capability for measuring large surface area.
• Thin film capability for measuring semi-transparent film thickness of 500 nm and above.

Typical application:

• Nondestructive characterization and quantification of surface roughness, step heights, critical dimensions, and other topographical features with excellent precision and accuracy.