Skip to Content
University of Oregon

Photovoltaics Characterization Facility

Dektak 6M stylus profilometer

dektak

Step height measurement of a polymer thin film on glass substrate.

Instrument Calendars:

Futures and specifications:

  • 12.5 µm stylus with adjustable tracking force (1—15mg).
  • Vertical range from 5 nm to 262 µm.
  • Maximum vertical resolution ∼ 1 nm.

Typical application:

  • Line by line step height measurements for determining thin film thickness and micro surface features.