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University of Oregon

Electron Probe Micro Analysis (EPMA)

CAMECA SX50 Electron Microprobe

epma_sx50_feature

Multi-phase analysis of ore minerals with spatial “traceback” of oxygen

Instrument Calendar:

Cameca SX50 features:

  • 4 Wavelength Dispersive Spectrometry (WDS) Bragg spectrometers
  • Bruker 10mm Silicon Drift Detector (SDD)
  • Energy Dispersive Spectrometry (EDS) detector with hyperspectral mapping
  • Optimized for thin film and particle analysis

Typical Applications:

  • Metallurgical studies, failure analysis, thin film, particulate analysis, mineral analysis, igneous petrology, semiconductor materials ceramic analysis, anthropological studies, art history and many others.

Ni-P oxide thin film on Si substrate. Multiple voltage EPMA analysis of thin film materials provides fast and accurate