Focused Ion-Beam and Scanning Electron Microscopy Facility (FIB-SEM)

The CAMCOR Alice C. Tyler Nanofabrication and FIB-SEM Facility provides an array of equipment supporting high resolution electron microscopy, nanofabrication, and material characterization techniques. The facility offers high-resolution scanning electron microscopy and ion-beam microscopy services, as well as electron-beam, and ion beam lithography.

The facility is equipped to support sample types from multiple disciplines, providing sample preparation equipment and services for biological, materials, and geological applications.

Documentation:

Kurt A. Langworthy
Director,
CAMCOR Nanofabrication and FIB-SEM Facility
klangwor@uoregon.edu
541.346.3660

University of Oregon