Focused Ion-Beam and Scanning Electron Microscopy Facility (FIB-SEM)

The CAMCOR Alice C. Tyler Nanofabrication and FIB-SEM Facility provides an array of equipment supporting high resolution electron microscopy, nanofabrication, and material characterization techniques. The facility offers high-resolution scanning electron microscopy and ion-beam microscopy services, as well as electron-beam, and ion beam lithography.

The facility is equipped to support sample types from multiple disciplines, providing sample preparation equipment and services for biological, materials, and geological applications.


Kurt A. Langworthy
CAMCOR Nanofabrication and FIB-SEM Facility

University of Oregon