FEI Helios 600 and 600i FIB-SEM

FIB-SEM Provides:

• Field emission electron and ion beam sources, allowing high resolution SEM imaging and excellent ion beam density
• Omniprobe and FEI micromanipulators for in-situ sample manipulation
• Electron flood gun charge neutralizer to assist in milling insulation substrates
• Quorum cryo transfer system for beam sensitive materials such as polymers or biological specimens
•  Gas injection systems to assist with electron/ion beam metal deposition, and ion milling applications (Pt, Insulator enhanced etch (XeF2), Selective carbon mill, and Carbon)
• 5-axes eucentric stage
• 16-bit patterning system
• STEM, Thru-lens immersion, Everhart-Thornley, CDEM, and CBS detectors
• drift-corrected frame integration imaging
• MAPS software for large area, high resolution imaging

Typical Applications:

• Site specific preparation of cross sections for high resolution SEM and TEM analysis.
• Deposition of metal contacts to devices
• SEM and Ion beam imaging of substrates