Zygo NewView 7300 optical 3D profilometer

Futures and specifications:

  • Non-contact, 3D surface profiling base on white light interferometry.
  • Sub Angstrom vertical resolution.
  • Sub micron lateral resolution.
  • Motorized objective and zoom lens turret.
  • Motorized 150 mm sample stage with tip/tilt control.
  • Field stitching capability for measuring large surface area.
  • Thin film capability for measuring semi-transparent film thickness of 500 nm and above.

Typical application:

  • Nondestructive characterization and quantification of surface roughness, step heights, critical dimensions, and other topographical features with excellent precision and accuracy.
University of Oregon