The CAMCOR Alice C. Tyler Nanofabrication and Imaging Facility provides an array of equipment supporting high resolution electron microscopy, nanofabrication, and electrical characterization techniques. The facility offers high resolution transmission electron microscopy and scanning electron microscopy services, as well as photo, electron, and ion beam lithography.
The facility is equipped to support sample types from multiple disciplines, providing sample preparation equipment and services for biological, materials, and geological applications. Amongst the preparation equipment are microtomes (cryo and room temp), a freeze etch device, low speed saws, polishing devices, and metal evaporators.
Instrumentation includes:
Facilities include:
- Photolithography Lab
- Semi-conductor Device Processing Lab
- Electrical Characterization Lab
Documentation:
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Kurt A. Langworthy
Director,
CAMCOR Nanofabrication and Imaging Facility
klangwor@uoregon.edu
541.346.3660 |
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