Focused Ion-Beam and Scanning Electron Microscopy Facility (FIB-SEM)
The CAMCOR Alice C. Tyler Nanofabrication and FIB-SEM Facility provides an array of equipment supporting high resolution electron microscopy, nanofabrication, and material characterization techniques. The facility offers high-resolution scanning electron microscopy and ion-beam microscopy services, as well as electron-beam, and ion beam lithography.
The facility is equipped to support sample types from multiple disciplines, providing sample preparation equipment and services for biological, materials, and geological applications.
Documentation:
Valerie Brogden, Lab Manager
CAMCOR FIB-SEM Facility
vbrogden@uoregon.edu
541.346.4778
Instrumentation
- ZEISS Ultra-55 Scanning Electron Microscope
- FEI Helios Dual Beam FIB – 600 (with cryo)
- FEI Helios Dual Beam FIB – 600i
- ThemoFisher Helios Hydra Plasma FIB
