Zygo NewView 7300 optical 3D proﬁlometer
Futures and speciﬁcations:
- Non-contact, 3D surface proﬁling base on white light interferometry.
- Sub Angstrom vertical resolution.
- Sub micron lateral resolution.
- Motorized objective and zoom lens turret.
- Motorized 150 mm sample stage with tip/tilt control.
- Field stitching capability for measuring large surface area.
- Thin ﬁlm capability for measuring semi-transparent ﬁlm thickness of 500 nm and above.
- Nondestructive characterization and quantiﬁcation of surface roughness, step heights, critical dimensions, and other topographical features with excellent precision and accuracy.