FEI Quanta 200 ESEM/VPSEM Microscopes
FEI Quanta 200 features:
- High resolution, high output thermal field emission microscope with 3-5 nm resolution
- Quantitative 3 dimensional stereo and “tri-ocular” imaging and visualization with profile, area, volume, roughness and waviness tools
- High sensitivity (18mm dia.) backscatter (BSE) detector for atomic number contrast
- High sensitivity panchromatic cathodo-luminescence (CL) system
- Thermo high speed 30 sq. mm. SDD EDS for spectrum imaging and phase analysis
- HKL electron backscatter detection (EBSD) system for orientation imaging and texture mapping of crystalline and polycrystalline materials
- Variable pressure mode for uncoated non-conductive samples
- ESEM mode and Peltier cold stage for wet samples (above the partial pressure of water)
- Hot stage (to 1000C) for in situ annealing experiments
- Peltier STEM stage for particle imaging
Typical Applications:
- Electron beam lithography, polycrystalline textures and orientation, nanotechnology, paleontology, anthropology, igneous petrology.